The Limits of detection for the monitoring of semiconductor manufacturing gas and vapor emissions by Fourier transform infrared (FTIR) spectroscopy

<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd">
  <record>
    <leader>00000nab a2200000 i 4500</leader>
    <controlfield tag="001">MAP20071019526</controlfield>
    <controlfield tag="003">MAP</controlfield>
    <controlfield tag="005">20080418115831.0</controlfield>
    <controlfield tag="007">hzruuu---uuuu</controlfield>
    <controlfield tag="008">940602e19890201usa||||    | |00010|eng d</controlfield>
    <datafield tag="035" ind1=" " ind2=" ">
      <subfield code="a">6800013261</subfield>
    </datafield>
    <datafield tag="040" ind1=" " ind2=" ">
      <subfield code="a">MAP</subfield>
      <subfield code="b">spa</subfield>
    </datafield>
    <datafield tag="084" ind1=" " ind2=" ">
      <subfield code="a">872</subfield>
    </datafield>
    <datafield tag="100" ind1="1" ind2=" ">
      <subfield code="0">MAPA20080311483</subfield>
      <subfield code="a">Strang, Christopher R.</subfield>
    </datafield>
    <datafield tag="245" ind1="1" ind2="4">
      <subfield code="a">The Limits of detection for the monitoring of semiconductor manufacturing gas and vapor emissions by Fourier transform infrared (FTIR) spectroscopy</subfield>
      <subfield code="c">Christopher R. Strang and Steven P. Levine</subfield>
    </datafield>
    <datafield tag="520" ind1=" " ind2=" ">
      <subfield code="a">To determine whether or not the Fourier transform infrared (FTIR) spectrometer is appropriate for industrial hygiene monitoring of the gases and vapors used in the semiconductor industry, the limits of detection (LOD) of these compounds were determined. The LODs were calculated using several widely used definitions to test whether the values obtained by the different methods would vary significantly. The experimental LOD values for the study compounds all were below their respective threshold limit values (TLVs)</subfield>
    </datafield>
    <datafield tag="650" ind1="1" ind2="1">
      <subfield code="0">MAPA20080585679</subfield>
      <subfield code="a">Higiene industrial</subfield>
    </datafield>
    <datafield tag="650" ind1="1" ind2="1">
      <subfield code="0">MAPA20080605278</subfield>
      <subfield code="a">Contaminantes químicos</subfield>
    </datafield>
    <datafield tag="650" ind1="1" ind2="1">
      <subfield code="0">MAPA20080565817</subfield>
      <subfield code="a">Gases tóxicos</subfield>
    </datafield>
    <datafield tag="650" ind1="1" ind2="1">
      <subfield code="0">MAPA20080545673</subfield>
      <subfield code="a">Vapores</subfield>
    </datafield>
    <datafield tag="650" ind1="1" ind2="1">
      <subfield code="0">MAPA20080590338</subfield>
      <subfield code="a">Detectores de gases</subfield>
    </datafield>
    <datafield tag="650" ind1="1" ind2="1">
      <subfield code="0">MAPA20080568825</subfield>
      <subfield code="a">Espectrometría</subfield>
    </datafield>
    <datafield tag="650" ind1="1" ind2="1">
      <subfield code="0">MAPA20080537562</subfield>
      <subfield code="a">FTIR</subfield>
    </datafield>
    <datafield tag="650" ind1="1" ind2="1">
      <subfield code="0">MAPA20080560973</subfield>
      <subfield code="a">Valores TLV</subfield>
    </datafield>
    <datafield tag="650" ind1="1" ind2="1">
      <subfield code="0">MAPA20080568832</subfield>
      <subfield code="a">Espectroscopia</subfield>
    </datafield>
    <datafield tag="700" ind1="1" ind2=" ">
      <subfield code="0">MAPA20080198398</subfield>
      <subfield code="a">Levine, Steven P.</subfield>
    </datafield>
    <datafield tag="740" ind1="0" ind2=" ">
      <subfield code="a">American Industrial Hygiene Association journal</subfield>
    </datafield>
    <datafield tag="773" ind1="0" ind2=" ">
      <subfield code="t">American Industrial Hygiene Association journal</subfield>
      <subfield code="d">Akron, Ohio</subfield>
      <subfield code="g">Vol. 50, nº 2, February 1989 ; p. 78-84</subfield>
    </datafield>
  </record>
</collection>