Assessment of arsenic exposures and control in galium arsenide production
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| Tag | 1 | 2 | Value |
|---|---|---|---|
| LDR | 00000nab a2200000 i 4500 | ||
| 001 | MAP20071019908 | ||
| 003 | MAP | ||
| 005 | 20080418115957.0 | ||
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| 040 | $aMAP$bspa | ||
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| 100 | 1 | $0MAPA20080148164$aSheehy, John W. | |
| 245 | 1 | 0 | $aAssessment of arsenic exposures and control in galium arsenide production$cJohn W. Sheehy and James H. Jones |
| 520 | $aThis paper summarizes the control measures and arsenic exposures determined for the following gallium arsenide processes: Liquid Encapsulated Czochralski (LEC) and Horizontal Bridgeman (HB) crystal growing, LEC cleaning operations, ingot grinding/wafer sawing, and epitaxy | ||
| 650 | 1 | 1 | $0MAPA20080585679$aHigiene industrial |
| 650 | 1 | 1 | $0MAPA20080605278$aContaminantes químicos |
| 650 | 1 | 1 | $0MAPA20080587079$aProductos químicos |
| 650 | 1 | 1 | $0MAPA20080546038$aArsénico |
| 650 | 1 | 1 | $0MAPA20080583606$aArseniuro de galio |
| 650 | 1 | 1 | $0MAPA20080603137$aProcesos industriales |
| 650 | 1 | 1 | $0MAPA20080589844$aControl de procesos |
| 700 | 1 | $0MAPA20080135973$aJones, James H. | |
| 740 | 0 | $aAmerican Industrial Hygiene Association journal | |
| 773 | 0 | $tAmerican Industrial Hygiene Association journal$dFairfax, Virginia$gVol. 54, nº 2, February 1993 ; p. 61-69 |