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Assessment of arsenic exposures and control in galium arsenide production

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008  940622e19930201usa|||| | |00010|eng d
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1001 ‎$0‎MAPA20080148164‎$a‎Sheehy, John W.
24510‎$a‎Assessment of arsenic exposures and control in galium arsenide production‎$c‎John W. Sheehy and James H. Jones
520  ‎$a‎This paper summarizes the control measures and arsenic exposures determined for the following gallium arsenide processes: Liquid Encapsulated Czochralski (LEC) and Horizontal Bridgeman (HB) crystal growing, LEC cleaning operations, ingot grinding/wafer sawing, and epitaxy
65011‎$0‎MAPA20080585679‎$a‎Higiene industrial
65011‎$0‎MAPA20080605278‎$a‎Contaminantes químicos
65011‎$0‎MAPA20080587079‎$a‎Productos químicos
65011‎$0‎MAPA20080546038‎$a‎Arsénico
65011‎$0‎MAPA20080583606‎$a‎Arseniuro de galio
65011‎$0‎MAPA20080603137‎$a‎Procesos industriales
65011‎$0‎MAPA20080589844‎$a‎Control de procesos
7001 ‎$0‎MAPA20080135973‎$a‎Jones, James H.
7400 ‎$a‎American Industrial Hygiene Association journal
7730 ‎$t‎American Industrial Hygiene Association journal‎$d‎Fairfax, Virginia‎$g‎Vol. 54, nº 2, February 1993 ; p. 61-69