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Assessment of arsenic exposures and control in galium arsenide production
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MAP20071019908
Sheehy, John W. ‌
Assessment of arsenic exposures and control in galium arsenide production / John W. Sheehy and James H. Jones
Sumario: This paper summarizes the control measures and arsenic exposures determined for the following gallium arsenide processes: Liquid Encapsulated Czochralski (LEC) and Horizontal Bridgeman (HB) crystal growing, LEC cleaning operations, ingot grinding/wafer sawing, and epitaxy
En: American Industrial Hygiene Association journal. - Fairfax, Virginia. - Vol. 54, nº 2, February 1993 ; p. 61-69
1. Higiene industrial ‌. 2. Contaminantes químicos ‌. 3. Productos químicos ‌. 4. Arsénico ‌. 5. Arseniuro de galio ‌. 6. Procesos industriales ‌. 7. Control de procesos ‌. I. Jones, James H. ‌. II. Title. III. Título: American Industrial Hygiene Association journal.