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Assessment of arsenic exposures and control in galium arsenide production
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Title: Assessment of arsenic exposures and control in galium arsenide production / John W. Sheehy and James H. JonesAuthor: Sheehy, John W. ‌
Notes: Sumario: This paper summarizes the control measures and arsenic exposures determined for the following gallium arsenide processes: Liquid Encapsulated Czochralski (LEC) and Horizontal Bridgeman (HB) crystal growing, LEC cleaning operations, ingot grinding/wafer sawing, and epitaxyRelated records: En: American Industrial Hygiene Association journal. - Fairfax, Virginia. - Vol. 54, nº 2, February 1993 ; p. 61-69Materia / lugar / evento: Higiene industrial ‌Contaminantes químicos ‌Productos químicos ‌Arsénico ‌Arseniuro de galio ‌Procesos industriales ‌Control de procesos ‌Otros autores: Jones, James H. ‌
Secondary titles: Título: American Industrial Hygiene Association journal
Other categories: 872
Rights: In Copyright (InC)