The Limits of detection for the monitoring of semiconductor manufacturing gas and vapor emissions by Fourier transform infrared (FTIR) spectroscopy

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<rdf:Description>
<dc:creator>Strang, Christopher R.</dc:creator>
<dc:creator>Levine, Steven P.</dc:creator>
<dc:date>1989-02-01</dc:date>
<dc:description xml:lang="es">Sumario: To determine whether or not the Fourier transform infrared (FTIR) spectrometer is appropriate for industrial hygiene monitoring of the gases and vapors used in the semiconductor industry, the limits of detection (LOD) of these compounds were determined. The LODs were calculated using several widely used definitions to test whether the values obtained by the different methods would vary significantly. The experimental LOD values for the study compounds all were below their respective threshold limit values (TLVs)</dc:description>
<dc:identifier>https://documentacion.fundacionmapfre.org/documentacion/publico/es/bib/47424.do</dc:identifier>
<dc:language>eng</dc:language>
<dc:rights xml:lang="es">InC - http://rightsstatements.org/vocab/InC/1.0/</dc:rights>
<dc:subject xml:lang="es">Higiene industrial</dc:subject>
<dc:subject xml:lang="es">Contaminantes químicos</dc:subject>
<dc:subject xml:lang="es">Gases tóxicos</dc:subject>
<dc:subject xml:lang="es">Vapores</dc:subject>
<dc:subject xml:lang="es">Detectores de gases</dc:subject>
<dc:subject xml:lang="es">Espectrometría</dc:subject>
<dc:subject xml:lang="es">FTIR</dc:subject>
<dc:subject xml:lang="es">Valores TLV</dc:subject>
<dc:subject xml:lang="es">Espectroscopia</dc:subject>
<dc:type xml:lang="es">Artículos y capítulos</dc:type>
<dc:title xml:lang="es">The Limits of detection for the monitoring of semiconductor manufacturing gas and vapor emissions by Fourier transform infrared (FTIR) spectroscopy</dc:title>
<dc:title xml:lang="es">Título: American Industrial Hygiene Association journal</dc:title>
<dc:relation xml:lang="es">En: American Industrial Hygiene Association journal. - Akron, Ohio. - Vol. 50, nº 2, February 1989 ; p. 78-84</dc:relation>
</rdf:Description>
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