Assessment of arsenic exposures and control in galium arsenide production

<?xml version="1.0" encoding="UTF-8" standalone="no"?>
<rdf:RDF xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
<rdf:Description>
<dc:creator>Sheehy, John W.</dc:creator>
<dc:creator>Jones, James H.</dc:creator>
<dc:date>1993-02-01</dc:date>
<dc:description xml:lang="es">Sumario: This paper summarizes the control measures and arsenic exposures determined for the following gallium arsenide processes: Liquid Encapsulated Czochralski (LEC) and Horizontal Bridgeman (HB) crystal growing, LEC cleaning operations, ingot grinding/wafer sawing, and epitaxy</dc:description>
<dc:identifier>https://documentacion.fundacionmapfre.org/documentacion/publico/es/bib/47747.do</dc:identifier>
<dc:language>eng</dc:language>
<dc:rights xml:lang="es">InC - http://rightsstatements.org/vocab/InC/1.0/</dc:rights>
<dc:subject xml:lang="es">Higiene industrial</dc:subject>
<dc:subject xml:lang="es">Contaminantes químicos</dc:subject>
<dc:subject xml:lang="es">Productos químicos</dc:subject>
<dc:subject xml:lang="es">Arsénico</dc:subject>
<dc:subject xml:lang="es">Arseniuro de galio</dc:subject>
<dc:subject xml:lang="es">Procesos industriales</dc:subject>
<dc:subject xml:lang="es">Control de procesos</dc:subject>
<dc:type xml:lang="es">Artículos y capítulos</dc:type>
<dc:title xml:lang="es">Assessment of arsenic exposures and control in galium arsenide production</dc:title>
<dc:title xml:lang="es">Título: American Industrial Hygiene Association journal</dc:title>
<dc:relation xml:lang="es">En: American Industrial Hygiene Association journal. - Fairfax, Virginia. - Vol. 54, nº 2, February 1993 ; p. 61-69</dc:relation>
</rdf:Description>
</rdf:RDF>