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Assessment of arsenic exposures and control in galium arsenide production

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      <subfield code="a">Assessment of arsenic exposures and control in galium arsenide production</subfield>
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      <subfield code="a">This paper summarizes the control measures and arsenic exposures determined for the following gallium arsenide processes: Liquid Encapsulated Czochralski (LEC) and Horizontal Bridgeman (HB) crystal growing, LEC cleaning operations, ingot grinding/wafer sawing, and epitaxy</subfield>
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      <subfield code="a">Jones, James H.</subfield>
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      <subfield code="a">American Industrial Hygiene Association journal</subfield>
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      <subfield code="t">American Industrial Hygiene Association journal</subfield>
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      <subfield code="g">Vol. 54, nº 2, February 1993 ; p. 61-69</subfield>
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