A Preliminary evaluation of the Fourier Transform Infrared (FTIR) spectrometer as a quantitative air monitor for semiconductor manufacturing process emissions
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd">
<record>
<leader>00000nab a2200000 i 4500</leader>
<controlfield tag="001">MAP20071019525</controlfield>
<controlfield tag="003">MAP</controlfield>
<controlfield tag="005">20080418115831.0</controlfield>
<controlfield tag="007">hzruuu---uuuu</controlfield>
<controlfield tag="008">940602e19890201usa|||| | |00010|eng d</controlfield>
<datafield tag="035" ind1=" " ind2=" ">
<subfield code="a">6800013260</subfield>
</datafield>
<datafield tag="040" ind1=" " ind2=" ">
<subfield code="a">MAP</subfield>
<subfield code="b">spa</subfield>
</datafield>
<datafield tag="084" ind1=" " ind2=" ">
<subfield code="a">872</subfield>
</datafield>
<datafield tag="100" ind1="1" ind2=" ">
<subfield code="0">MAPA20080311483</subfield>
<subfield code="a">Strang, Christopher R.</subfield>
</datafield>
<datafield tag="245" ind1="1" ind2="2">
<subfield code="a">A Preliminary evaluation of the Fourier Transform Infrared (FTIR) spectrometer as a quantitative air monitor for semiconductor manufacturing process emissions</subfield>
<subfield code="c">Christopher R. Strang, Steven P. Levine and William F. Herget</subfield>
</datafield>
<datafield tag="520" ind1=" " ind2=" ">
<subfield code="a">Preliminary research showed that the Fourier transform infrared (FTIR) spectrometer may be appropriate for detecting the various gases and vapors that could be present at a semiconductor manufacturing facility. A subset of the many gases and vapors used during the silicon processing sequence were diluted in air to sub-part-per-million concentrations to simulate potential workplace conditions. The preliminary results support the conclusion that the FTIR spectrometer is appropriate for quantitative air monitoring of selected compounds at a semiconductor manufacturing facility</subfield>
</datafield>
<datafield tag="650" ind1="1" ind2="1">
<subfield code="0">MAPA20080585679</subfield>
<subfield code="a">Higiene industrial</subfield>
</datafield>
<datafield tag="650" ind1="1" ind2="1">
<subfield code="0">MAPA20080605278</subfield>
<subfield code="a">Contaminantes químicos</subfield>
</datafield>
<datafield tag="650" ind1="1" ind2="1">
<subfield code="0">MAPA20080565817</subfield>
<subfield code="a">Gases tóxicos</subfield>
</datafield>
<datafield tag="650" ind1="1" ind2="1">
<subfield code="0">MAPA20080545673</subfield>
<subfield code="a">Vapores</subfield>
</datafield>
<datafield tag="650" ind1="1" ind2="1">
<subfield code="0">MAPA20080590338</subfield>
<subfield code="a">Detectores de gases</subfield>
</datafield>
<datafield tag="650" ind1="1" ind2="1">
<subfield code="0">MAPA20080568825</subfield>
<subfield code="a">Espectrometría</subfield>
</datafield>
<datafield tag="650" ind1="1" ind2="1">
<subfield code="0">MAPA20080537562</subfield>
<subfield code="a">FTIR</subfield>
</datafield>
<datafield tag="700" ind1="1" ind2=" ">
<subfield code="0">MAPA20080198398</subfield>
<subfield code="a">Levine, Steven P.</subfield>
</datafield>
<datafield tag="700" ind1="1" ind2=" ">
<subfield code="0">MAPA20080220570</subfield>
<subfield code="a">Herget, William F.</subfield>
</datafield>
<datafield tag="740" ind1="0" ind2=" ">
<subfield code="a">American Industrial Hygiene Association journal</subfield>
</datafield>
<datafield tag="773" ind1="0" ind2=" ">
<subfield code="t">American Industrial Hygiene Association journal</subfield>
<subfield code="d">Akron, Ohio</subfield>
<subfield code="g">Vol. 50, nº 2, February 1989 ; p. 70-77</subfield>
</datafield>
</record>
</collection>